Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design

Wemyss, T. and Phelan, J. (2005) Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design. In: 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005, 2005-05-08 - 2005-05-11.

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Abstract

Temperature induced expansion can result in unwanted movements along all axes of precision positioning stages. As part of the development of such a stage, finite element analysis techniques were applied to test design configurations and to facilitate the convergence on optimum solutions. This extended abstract presents is a sample of the FEA work done in the design of an XY flexure stage which will form the basis for a new XYZ contouring system. A previous paper outlining in a more general context the development of this stage entitled "Movement at nano resolution in a noisy environment" was presented at the 2004 International Manufacturing Conference in Limerick, Ireland.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: /dk/atira/pure/subjectarea/asjc/2200/2209
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Depositing User: Admin SSL
Date Deposited: 19 Oct 2022 23:13
Last Modified: 07 Feb 2023 00:00
URI: http://repository-testing.wit.ie/id/eprint/4746

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